The Plasma Enhanced Atomic Layer Deposition Publication Database is developed and maintained by Plasma ALD, LLC, a developer and supplier of inductively coupled plasma (ICP) sources for plasma-enhanced atomic layer deposition (PEALD), atomic layer etch (ALE), thin-film etching, surface cleaning, surface modification, and research plasma systems.
Our ICP sources are designed for integration with existing ALD and vacuum-processing equipment. Plasma ALD also provides plasma-source integration, process-development, and troubleshooting assistance based on decades of experience with low-pressure plasma processing and PEALD systems.
Researchers, universities, equipment manufacturers, and laboratories looking for an ICP plasma source or assistance adding plasma capability to a vacuum system can learn more on our Plasma Sources page.
Your search for plasma enhanced atomic layer deposition publications authored by A. Aierken returned 2 record(s).
| Number | Title |
|---|---|
| 1 | Properties of atomic-layer-deposited ultra-thin AlN films on GaAs surfaces |
| 2 | GaAs surface passivation by plasma-enhanced atomic-layer-deposited aluminum nitride |