Ashish V. Jagtiani Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by Ashish V. Jagtiani returned 1 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
| Number | Title |
|---|---|
| 1 | Initial evaluation and comparison of plasma damage to atomic layer carbon materials using conventional and low Te plasma sources |