Hyungtak Seo Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by Hyungtak Seo returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Deposition and Plasma Measurements of Zr-Oxide Films with Low Impurity Concentrations by Remote PEALD|
|2||Moisture Barrier Properties of Al2O3 Films deposited by Remote Plasma Atomic Layer Deposition at Low Temperatures|