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Kai Arstila Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Kai Arstila returned 8 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Low-Temperature Deposition of Aluminum Oxide by Radical Enhanced Atomic Layer Deposition - Thesis Coverage
2Radical-Enhanced Atomic Layer Deposition of Silver Thin Films Using Phosphine-Adducted Silver Carboxylates - Thesis Coverage
3Radical Enhanced Atomic Layer Deposition of Titanium Dioxide
4Antiferromagnetism and p-type conductivity of nonstoichiometric nickel oxide thin films
5Radical Enhanced Atomic Layer Deposition of Titanium Dioxide - Thesis Coverage
6Radical-Enhanced Atomic Layer Deposition of Silver Thin Films Using Phosphine-Adducted Silver Carboxylates
7Radical-Enhanced Atomic Layer Deposition of Metallic Copper Thin Films - Thesis Coverage
8The α and γ plasma modes in plasma-enhanced atomic layer deposition with O2-N2 capacitive discharges