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Radical-Enhanced Atomic Layer Deposition of Silver Thin Films Using Phosphine-Adducted Silver Carboxylates

Type:
Journal
Info:
Chem. Vap. Deposition 2007, 13, 408–413
Date:
2007-03-06
DOI:
http://dx.doi.org/10.1002/cvde.200606519

Author Information

Name Institution
Antti NiskanenUniversity of Helsinki
Timo T. HatanpääUniversity of Helsinki
Kai ArstilaUniversity of Helsinki
Markku A. LeskeläUniversity of Helsinki
Mikko K. RitalaUniversity of Helsinki

Films

Plasma Ag

Hardware used: ASM Microchemistry F-120
Ag(DMP)(TEP), (2,2-dimethylpropionato) silver(I) triethylphosphine
CAS#: 0-0-0
H2, Hydrogen
CAS#: 1333-74-0
Deposition Temperature = 140C

Plasma Ag

Hardware used: ASM Microchemistry F-120
Ag(DMP)(TBP), (2,2-dimethylpropionato) silver(I) tributylphosphine
CAS#: 0-0-0
H2, Hydrogen
CAS#: 1333-74-0
Deposition Temperature Range N/A

Film/Plasma Properties

Characteristic: Precursor Characterization
Analysis: CHN Elemental Analysis
Diagnostic: -

Characteristic: Precursor Characterization
Analysis: FTIR, Fourier Transform InfraRed spectroscopy
Diagnostic: -

Characteristic: Precursor Characterization
Analysis: NMR, Nuclear Magnetic Resonance
Diagnostic: -

Characteristic: Precursor Characterization
Analysis: QMS, Quadrupole Mass Spectrometer
Diagnostic: -

Characteristic: Precursor Characterization
Analysis: SDTA, Simultaneous Difference Thermal Analysis
Diagnostic: -

Characteristic: Precursor Characterization
Analysis: TGA, Thermo Gravimetric Analysis
Diagnostic: -

Characteristic: Conformality, Step Coverage
Analysis: SEM, Scanning Electron Microscopy
Diagnostic: Hitachi S-4800 Field Emission Scanning Electron Microscope

Characteristic: Density
Analysis: XRR, X-Ray Reflectivity
Diagnostic: Bruker-Axs D8 Advance diffractometer/reflectometer

Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: XRD, X-Ray Diffraction
Diagnostic: Bruker-Axs D8 Advance diffractometer/reflectometer

Characteristic: Morphology, Roughness, Topography
Analysis: XRR, X-Ray Reflectivity
Diagnostic: Bruker-Axs D8 Advance diffractometer/reflectometer

Characteristic: Morphology, Roughness, Topography
Analysis: SEM, Scanning Electron Microscopy
Diagnostic: Hitachi S-4800 Field Emission Scanning Electron Microscope

Characteristic: Chemical Composition, Impurities
Analysis: TOF-ERDA, Time-Of-Flight Elastic Recoil Detection Analysis
Diagnostic: -

Characteristic: Resistivity, Sheet Resistance
Analysis: -
Diagnostic: -

Characteristic: Thickness
Analysis: EDS, EDX, Energy Dispersive X-ray Spectroscopy
Diagnostic: Oxford INCA 350 Energy Spectrometer

Substrates

Glass
Silicon

Notes

Aeronex GateKeeper gas purifiers used
41