B. Hintze Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by B. Hintze returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Approximation of PE-MOCVD to ALD for TiN Concerning Resistivity and Chemical Composition|
|2||Properties of Plasma-Enhanced Atomic Layer Deposition-Grown Tantalum Carbonitride Thin Films|