Mari Napari Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Mari Napari returned 4 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

1Antiferromagnetism and p-type conductivity of nonstoichiometric nickel oxide thin films
2Atomic scale surface modification of TiO2 3D nano-arrays: plasma enhanced atomic layer deposition of NiO for photocatalysis
3Room-temperature plasma-enhanced atomic layer deposition of ZnO: Film growth dependence on the PEALD reactor configuration
4The α and γ plasma modes in plasma-enhanced atomic layer deposition with O2-N2 capacitive discharges