Mari Napari Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Mari Napari returned 5 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Room-temperature plasma-enhanced atomic layer deposition of ZnO: Film growth dependence on the PEALD reactor configuration
2Ti Alloyed α-Ga2O3: Route towards Wide Band Gap Engineering
3The α and γ plasma modes in plasma-enhanced atomic layer deposition with O2-N2 capacitive discharges
4Antiferromagnetism and p-type conductivity of nonstoichiometric nickel oxide thin films
5Atomic scale surface modification of TiO2 3D nano-arrays: plasma enhanced atomic layer deposition of NiO for photocatalysis