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An economical, compact inductively coupled plasma source.

Ideal for:
  • Plasma-Enhanced Atomic Layer Deposition
  • Thin Film Etch
  • Surface cleaning
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Mari Napari Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Mari Napari returned 5 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Antiferromagnetism and p-type conductivity of nonstoichiometric nickel oxide thin films
2Ti Alloyed α-Ga2O3: Route towards Wide Band Gap Engineering
3The α and γ plasma modes in plasma-enhanced atomic layer deposition with O2-N2 capacitive discharges
4Room-temperature plasma-enhanced atomic layer deposition of ZnO: Film growth dependence on the PEALD reactor configuration
5Atomic scale surface modification of TiO2 3D nano-arrays: plasma enhanced atomic layer deposition of NiO for photocatalysis