Oili M. E. Ylivaara Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Oili M. E. Ylivaara returned 4 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Comparison of mechanical properties and composition of magnetron sputter and plasma enhanced atomic layer deposition aluminum nitride films
2Low-Temperature Plasma-Enhanced Atomic Layer Deposition of SiO2 Using Carbon Dioxide
3Thermal and plasma enhanced atomic layer deposition of SiO2 using commercial silicon precursors
4Tribological properties of thin films made by atomic layer deposition sliding against silicon