Chao Xia Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Chao Xia returned 3 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Properties of HfAlO film deposited by plasma enhanced atomic layer deposition
2Low-temperature plasma-enhanced atomic layer deposition of HfO2/Al2O3 nanolaminate structure on Si
3Properties of HfLaO MOS capacitor deposited on SOI with plasma enhanced atomic layer deposition