Byeonghyeon Jang Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by Byeonghyeon Jang returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
| Number | Title |
|---|---|
| 1 | A controlled growth of WNx and WCx thin films prepared by atomic layer deposition |
| 2 | Hydrogen plasma-enhanced atomic layer deposition of hydrogenated amorphous carbon thin films |