Byeonghyeon Jang Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by Byeonghyeon Jang returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Hydrogen plasma-enhanced atomic layer deposition of hydrogenated amorphous carbon thin films|
|2||A controlled growth of WNx and WCx thin films prepared by atomic layer deposition|