Heon-Do Kim Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Heon-Do Kim returned 4 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Lanthanum-Oxide Thin Films Deposited by Plasma-Enhanced Atomic Layer Deposition
2Characteristics of high-k dielectric ECR-ALD lanthanum hafnium oxide (LHO) films
3Correlation of carbon content with the thermal stability of ruthenium deposited by using RF-direct plasma-enhanced atomic-layer deposition
4Comparison of the Deposition Characteristics and Electrical Properties for La2O3, HfO2 and LHO Films