Syed B. Qadri Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Syed B. Qadri returned 9 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Role of plasma properties in controlling crystallinity and phase in oxide films grown by plasma-enhanced atomic layer epitaxy
2Phase Control of Crystalline Ga2O3 Films by Plasma-Enhanced Atomic Layer Deposition
3Growth of AlN/Pt heterostructures on amorphous substrates at low temperatures via atomic layer epitaxy
4The role of plasma in plasma-enhanced atomic layer deposition of crystalline films
5Microstructure and Interfaces of Ultra-Thin Epitaxial AlN Films Grown by Plasma-Enhanced Atomic Layer Deposition at Relatively Low Temperatures
6Epitaxial growth of AlN films via plasma-assisted atomic layer epitaxy
7Epitaxial Growth of Cubic and Hexagonal InN Thin Films via Plasma-Assisted Atomic Layer Epitaxy
8Impact of Growth Conditions on the Phase Selectivity and Epitaxial Quality of TiO2 Films Grown by the Plasma-Assisted Atomic Layer Deposition
9Plasma-assisted atomic layer epitaxial growth of aluminum nitride studied with real time grazing angle small angle x-ray scattering