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An economical, compact inductively coupled plasma source.

Ideal for:
  • Plasma-Enhanced Atomic Layer Deposition
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Masakiyo Matsumura Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Masakiyo Matsumura returned 4 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Gas-phase-reaction-controlled atomic-layer-epitaxy of silicon
2Hydrogen-induced abstraction mechanism of surface methyl groups in atomic-layer-epitaxy of germanium
3Atomic hydrogen-assisted ALE of germanium
4Atomic layer epitaxy of germanium