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An economical, compact inductively coupled plasma source.

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Jun-Rae Kim Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Jun-Rae Kim returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Low-temperature SiON films deposited by plasma-enhanced atomic layer deposition method using activated silicon precursor
2Low Temperature Formation of Silicon Oxide Thin Films by Atomic Layer Deposition Using NH3/O2 Plasma