Jun-Rae Kim Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by Jun-Rae Kim returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Low Temperature Formation of Silicon Oxide Thin Films by Atomic Layer Deposition Using NH3/O2 Plasma|
|2||Low-temperature SiON films deposited by plasma-enhanced atomic layer deposition method using activated silicon precursor|