Your search for plasma enhanced atomic layer deposition publications authored by Jun-Rae Kim returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Low Temperature Formation of Silicon Oxide Thin Films by Atomic Layer Deposition Using NH3/O2 Plasma|
|2||Low-temperature SiON films deposited by plasma-enhanced atomic layer deposition method using activated silicon precursor|
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