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An economical, compact inductively coupled plasma source.

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Michel P. de Jong Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Michel P. de Jong returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Initial growth, refractive index, and crystallinity of thermal and plasma-enhanced atomic layer deposition AlN films
2Comparative study of thermal and radical-enhanced methods for growing boron nitride films from diborane and ammonia