Michel P. de Jong Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by Michel P. de Jong returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Comparative study of thermal and radical-enhanced methods for growing boron nitride films from diborane and ammonia|
|2||Initial growth, refractive index, and crystallinity of thermal and plasma-enhanced atomic layer deposition AlN films|