Kenichiro Mizohata Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Kenichiro Mizohata returned 3 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

1Preparation of Lithium Containing Oxides by the Solid State Reaction of Atomic Layer Deposited Thin Films
2MANOS performance dependence on ALD Al2O3 oxidation source
3Low-Temperature Plasma-Enhanced Atomic Layer Deposition of SiO2 Using Carbon Dioxide