Kenichiro Mizohata Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Kenichiro Mizohata returned 3 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

1Preparation of Lithium Containing Oxides by the Solid State Reaction of Atomic Layer Deposited Thin Films
2Low-Temperature Plasma-Enhanced Atomic Layer Deposition of SiO2 Using Carbon Dioxide
3MANOS performance dependence on ALD Al2O3 oxidation source