Your search for plasma enhanced atomic layer deposition publications authored by Dustin Zachary Austin returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Atomic Layer Deposition of Ruthenium and Ruthenium Oxide Using a Zero-Oxidation State Precursor|
|2||Plasma Enhanced Atomic Layer Deposition of Al2O3/SiO2 MIM Capacitors|
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