Dustin Zachary Austin Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by Dustin Zachary Austin returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
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1 | Plasma Enhanced Atomic Layer Deposition of Al2O3/SiO2 MIM Capacitors |
2 | Atomic Layer Deposition of Ruthenium and Ruthenium Oxide Using a Zero-Oxidation State Precursor |