Dustin Zachary Austin Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Dustin Zachary Austin returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Atomic Layer Deposition of Ruthenium and Ruthenium Oxide Using a Zero-Oxidation State Precursor
2Plasma Enhanced Atomic Layer Deposition of Al2O3/SiO2 MIM Capacitors


Shortcuts



© 2014-2019 plasma-ald.com