J. Riikonen Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by J. Riikonen returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||High-k GaAs metal insulator semiconductor capacitors passivated by ex-situ plasma-enhanced atomic layer deposited AlN for Fermi-level unpinning|
|2||Properties of atomic-layer-deposited ultra-thin AlN films on GaAs surfaces|