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An economical, compact inductively coupled plasma source.

Ideal for:
  • Plasma-Enhanced Atomic Layer Deposition
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M. Modreanu Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by M. Modreanu returned 3 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Growth of V2O5 Films for Battery Applications by Pulsed Chemical Vapor Deposition
2Influence of Substrate on Hafnium Silicate Metal-Insulator-Metal Capacitors Grown by Atomic Layer Deposition
3Evaluation of V2O5 Coatings Grown By Plasma Enhanced and Thermal Atomic Layer Deposition