Your search for plasma enhanced atomic layer deposition publications authored by M. Modreanu returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Evaluation of V2O5 Coatings Grown By Plasma Enhanced and Thermal Atomic Layer Deposition|
|2||Influence of Substrate on Hafnium Silicate Metal-Insulator-Metal Capacitors Grown by Atomic Layer Deposition|
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