M. G. Kozodaev Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by M. G. Kozodaev returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Temperature controlled Ru and RuO2 growth via O* radical-enhanced atomic layer deposition with Ru(EtCp)2|
|2||Ferroelectric properties of full plasma-enhanced ALD TiN/La:HfO2/TiN stacks|