Alexei D. Bouravleuv Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Alexei D. Bouravleuv returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

1Aluminum Nitride Transition Layer for Power Electronics Applications Grown by Plasma-Enhanced Atomic Layer Deposition
2Surface passivation of GaAs nanowires by the atomic layer deposition of AlN