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An economical, compact inductively coupled plasma source.

Ideal for:
  • Plasma-Enhanced Atomic Layer Deposition
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  • Surface cleaning
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Florian Werner Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Florian Werner returned 4 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Improved understanding of recombination at the Si/Al2O3 interface
2Silicon surface passivation by ultrathin Al2O3 films and Al2O3/SiNx stacks
3Industrially relevant Al2O3 deposition techniques for the surface passivation of Si solar cells
4Injection dependence of the effective lifetime of n-type Si passivated by Al2O3: An edge effect?