Richard Potter Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Richard Potter returned 3 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

1Gadolinium nitride films deposited using a PEALD based process
2A comparison between remote plasma-enhanced and thermal ALD of Hafnium-nitride thin films
3Preliminary investigation of high-k materials - TiO2 doped Ta2O5 films by remote plasma ALD