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An economical, compact inductively coupled plasma source.

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Matthew A. Thomas Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Matthew A. Thomas returned 3 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1New approach toward transparent and conductive ZnO by atomic layer deposition: Hydrogen plasma doping
2The Effects of an O2 Plasma on the Optical Properties of Atomic Layer Deposited ZnO
3Highly Tunable Electrical Properties in Undoped ZnO Grown by Plasma Enhanced Thermal-ALD