Dong-Jin Park Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Dong-Jin Park returned 3 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Fabrication of self-aligned TFTs with a ultra-low temperature polycrystalline silicon process on metal foils
2Stabilization of Al2O3 gate oxide on plastic substrate for low temperature poly-silicon by in situ plasma treatment
3The physical properties of cubic plasma-enhanced atomic layer deposition TaN films