C-F Lo Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by C-F Lo returned 3 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1GaN metal-insulator-semiconductor high-electron-mobility transistor with plasma enhanced atomic layer deposited AlN as gate dielectric and passivation
2High breakdown voltage in AlN/GaN metal-insulator-semiconductor high-electron-mobility transistors
3Comparison of passivation layers for AlGaN/GaN high electron mobility transistors