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Vesa Vuorinen Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by Vesa Vuorinen returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
| Number | Title |
|---|---|
| 1 | Structural and chemical analysis of annealed plasma-enhanced atomic layer deposition aluminum nitride films |
| 2 | Blistering mechanisms of atomic-layer-deposited AlN and Al2O3 films |