Vesa Vuorinen Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Vesa Vuorinen returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

1Blistering mechanisms of atomic-layer-deposited AlN and Al2O3 films
2Structural and chemical analysis of annealed plasma-enhanced atomic layer deposition aluminum nitride films