Kwunbum Chung Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by Kwunbum Chung returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|Characteristics of HfO2 thin films grown by plasma atomic layer deposition
|Composition, structure, and electrical characteristics of HfO2 gate dielectrics grown using the remote- and direct-plasma atomic layer deposition methods