Mengjun Li Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Mengjun Li returned 1 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1823-mA/mm Drain Current Density and 945-MW/cm2 Baliga's Figure-of-Merit Enhancement-Mode GaN MISFETs With a Novel PEALD-AlN/LPCVD-Si3N4 Dual-Gate Dielectric


Shortcuts



© 2014-2019 plasma-ald.com