Frank Greer Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by Frank Greer returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
| Number | Title |
|---|---|
| 1 | Fundamental beam studies of radical enhanced atomic layer deposition of TiN |
| 2 | Fabrication and deformation of three-dimensional hollow ceramic nanostructures |