Emanuel Knehr Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Emanuel Knehr returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

1Nanowire single-photon detectors made of atomic layer-deposited niobium nitride
2Wafer-level uniformity of atomic-layer-deposited niobium nitride thin films for quantum devices