P. Kudlacek Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by P. Kudlacek returned 3 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

1In situ reaction mechanism studies of plasma-assisted atomic layer deposition of Al2O3
2The Influence of Ions and Photons during Plasma-Assisted ALD of Metal Oxides
3Ion and Photon Surface Interaction during Remote Plasma ALD of Metal Oxides