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Ming-Chih Lin Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by Ming-Chih Lin returned 1 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
| Number | Title |
|---|---|
| 1 | Uniform GaN thin films grown on (100) silicon by remote plasma atomic layer deposition |