Anton J. Bauer Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Anton J. Bauer returned 3 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Analysis of NbN thin film deposition by plasma-enhanced ALD for gate electrode application
2Evaluation of NbN thin films grown by MOCVD and plasma-enhanced ALD for gate electrode application in high-k/SiO2 gate stacks
3Tailoring the Electrical Properties of HfO2 MOS-Devices by Aluminum Doping


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