
Yunfei Wang Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by Yunfei Wang returned 1 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
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1 | The role of active species in the N2 and N2-H2 RF afterglows on selective surface nitriding of ALD-grown TiO2 films |