Johan A. Martens Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Johan A. Martens returned 4 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Controllable nitrogen doping in as deposited TiO2 film and its effect on post deposition annealing
2Independent tuning of size and coverage of supported Pt nanoparticles using atomic layer deposition
3Manganese oxide films with controlled oxidation state for water splitting devices through a combination of atomic layer deposition and post-deposition annealing
4Plasma enhanced atomic layer deposition of Ga2O3 thin films