Seong-Il Kim Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by Seong-Il Kim returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Method to enhance atomic-layer deposition of tungsten-nitride diffusion barrier for Cu interconnect|
|2||A New Pulse Plasma Enhanced Atomic Layer Deposition of Tungsten Nitride Diffusion Barrier for Copper Interconnect|