Marc Schaekers Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Marc Schaekers returned 3 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

1Scalability of plasma enhanced atomic layer deposited ruthenium films for interconnect applications
2Near room temperature plasma enhanced atomic layer deposition of ruthenium using the RuO4-precursor and H2-plasma
3Low temperature plasma-enhanced atomic layer deposition of thin vanadium nitride layers for copper diffusion barriers