Hyun-Jung Lee Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Hyun-Jung Lee returned 3 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

1Atomic Layer Deposition of Ru Thin Films Using a New Beta-Diketonate Ru Precursor and NH3 Plasma as a Reactant
2A controlled growth of WNx and WCx thin films prepared by atomic layer deposition
3Atomic layer deposited self-forming Ru-Mn diffusion barrier for seedless Cu interconnects