Sean T. Barry Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Sean T. Barry returned 5 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

1Deposition of copper by plasma-enhanced atomic layer deposition using a novel N-Heterocyclic carbene precursor
2Resolving Impurities in Atomic Layer Deposited Aluminum Nitride through Low Cost, High Efficiency Precursor Design
3Plasma-Enhanced Atomic Layer Deposition of Nanostructured Gold Near Room Temperature
4Tris(dimethylamido)aluminum(III): An overlooked atomic layer deposition precursor
5Atomic Layer Deposition of Gold Metal