Sean T. Barry Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Sean T. Barry returned 5 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Plasma-Enhanced Atomic Layer Deposition of Nanostructured Gold Near Room Temperature
2Resolving Impurities in Atomic Layer Deposited Aluminum Nitride through Low Cost, High Efficiency Precursor Design
3Atomic Layer Deposition of Gold Metal
4Tris(dimethylamido)aluminum(III): An overlooked atomic layer deposition precursor
5Deposition of copper by plasma-enhanced atomic layer deposition using a novel N-Heterocyclic carbene precursor