Sean T. Barry Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Sean T. Barry returned 5 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Deposition of copper by plasma-enhanced atomic layer deposition using a novel N-Heterocyclic carbene precursor
2Tris(dimethylamido)aluminum(III): An overlooked atomic layer deposition precursor
3Plasma-Enhanced Atomic Layer Deposition of Nanostructured Gold Near Room Temperature
4Resolving Impurities in Atomic Layer Deposited Aluminum Nitride through Low Cost, High Efficiency Precursor Design
5Atomic Layer Deposition of Gold Metal