Sean T. Barry Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Sean T. Barry returned 4 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Atomic Layer Deposition of Gold Metal
2Deposition of copper by plasma-enhanced atomic layer deposition using a novel N-Heterocyclic carbene precursor
3Resolving Impurities in Atomic Layer Deposited Aluminum Nitride through Low Cost, High Efficiency Precursor Design
4Tris(dimethylamido)aluminum(III): An overlooked atomic layer deposition precursor