Publication Information

Title:
Atomic Layer Deposition of Gold Metal
Type:
Journal
Info:
Chem. Mater.
Date:
2015-12-28

Author Information

Name Institution
Matthew B. E. GriffithsCarleton University
Peter J. PallisterCarleton University
David J. MandiaCarleton University
Sean T. BarryCarleton University

Films

Other Au


Film/Plasma Properties

Characteristic: Chemical Composition, Impurities
Analysis: XPS, X-ray Photoelectron Spectroscopy

Characteristic: Chemical Composition, Impurities
Analysis: EDS, EDX, Energy Dispersive X-ray Spectroscopy

Characteristic: Images
Analysis: TEM, Transmission Electron Microscope

Characteristic: Precursor Characterization
Analysis: TGA, Thermo Gravimetric Analysis

Characteristic: Precursor Characterization
Analysis: Vapor Pressure

Characteristic: Morphology, Roughness, Topography
Analysis: SEM, Scanning Electron Microscopy

Characteristic: Images
Analysis: SEM, Scanning Electron Microscopy

Substrates

Si(100)
Glass

Keywords

Nucleation

Notes

443