Publication Information

Title: Atomic Layer Deposition of Gold Metal

Type: Journal

Info: Chem. Mater.

Date: 2015-12-28

DOI: http://dx.doi.org/10.1021/acs.chemmater.5b04562

Author Information

Name

Institution

Carleton University

Carleton University

Carleton University

Carleton University

Films

Other Au using Picosun R200

Deposition Temperature = 120C

33012-33-8

7782-44-7

7732-18-5

Film/Plasma Properties

Characteristic

Analysis

Diagnostic

Chemical Composition, Impurities

XPS, X-ray Photoelectron Spectroscopy

Unknown

Chemical Composition, Impurities

EDS, EDX, Energy Dispersive X-ray Spectroscopy

Unknown

Images

TEM, Transmission Electron Microscope

Unknown

Precursor Characterization

TGA, Thermo Gravimetric Analysis

TA Instruments Q500 with EGA furnace

Precursor Characterization

Vapor Pressure

TA Instruments Q500 with EGA furnace

Morphology, Roughness, Topography

SEM, Scanning Electron Microscopy

Tescan Vega-II XMU

Images

SEM, Scanning Electron Microscopy

Tescan Vega-II XMU

Substrates

Si(100)

Glass

Keywords

Nucleation

Notes

443



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