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Atomic Layer Deposition of Gold Metal
Type:
Journal
Info:
Chem. Mater.
Date:
2015-12-28
Author Information
| Name | Institution |
|---|---|
| Matthew B. E. Griffiths | Carleton University |
| Peter J. Pallister | Carleton University |
| David J. Mandia | Carleton University |
| Sean T. Barry | Carleton University |
Films
Other Au
Film/Plasma Properties
Characteristic: Chemical Composition, Impurities
Analysis: XPS, X-ray Photoelectron Spectroscopy
Characteristic: Chemical Composition, Impurities
Analysis: EDS, EDX, Energy Dispersive X-ray Spectroscopy
Characteristic: Images
Analysis: TEM, Transmission Electron Microscope
Characteristic: Precursor Characterization
Analysis: TGA, Thermo Gravimetric Analysis
Characteristic: Precursor Characterization
Analysis: Vapor Pressure
Characteristic: Morphology, Roughness, Topography
Analysis: SEM, Scanning Electron Microscopy
Characteristic: Images
Analysis: SEM, Scanning Electron Microscopy
Substrates
| Si(100) |
| Glass |
Notes
| 443 |