David J. Mandia Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by David J. Mandia returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

1Atomic Layer Deposition of Gold Metal
2Tris(dimethylamido)aluminum(III): An overlooked atomic layer deposition precursor