K. Haesevoets Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by K. Haesevoets returned 1 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Low temperature deposition of 2D WS2 layers from WF6 and H2S precursors: impact of reducing agents