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D. P. Valyukhov Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by D. P. Valyukhov returned 1 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
| Number | Title |
|---|---|
| 1 | Growth of aluminum nitride films by plasma-enhanced atomic layer deposition |