Hohyun Song Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Hohyun Song returned 1 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Study on SiN and SiCN film production using PE-ALD process with high-density multi-ICP source at low temperature