Vijay Narayanan Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by Vijay Narayanan returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
| Number | Title |
|---|---|
| 1 | Oxygen migration in TiO2-based higher-k gate stacks |
| 2 | The physical properties of cubic plasma-enhanced atomic layer deposition TaN films |