Vijay Narayanan Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Vijay Narayanan returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

1The physical properties of cubic plasma-enhanced atomic layer deposition TaN films
2Oxygen migration in TiO2-based higher-k gate stacks