The Plasma Enhanced Atomic Layer Deposition Publication Database is developed and maintained by Plasma ALD, LLC, a developer and supplier of inductively coupled plasma (ICP) sources for plasma-enhanced atomic layer deposition (PEALD), atomic layer etch (ALE), thin-film etching, surface cleaning, surface modification, and research plasma systems.
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Your search for plasma enhanced atomic layer deposition publications authored by M. Yu. Shevchenko returned 2 record(s).
| Number | Title |
|---|---|
| 1 | Growth of aluminum nitride films by plasma-enhanced atomic layer deposition |
| 2 | Growing c-axis oriented aluminum nitride films by Plasma-Enhanced Atomic Layer Deposition at low temperatures |