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  • Plasma-Enhanced Atomic Layer Deposition
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Qi Xie Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Qi Xie returned 6 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Texture of atomic layer deposited ruthenium
2Diffusion barrier properties of TaNx films prepared by plasma enhanced atomic layer deposition from PDMAT with N2 or NH3 plasma
3Ru thin film grown on TaN by plasma enhanced atomic layer deposition
4TaCN growth with PDMAT and H2/Ar plasma by plasma enhanced atomic layer deposition
5Growth Kinetics and Crystallization Behavior of TiO2 Films Prepared by Plasma Enhanced Atomic Layer Deposition
6Atomic layer deposition of titanium nitride from TDMAT precursor