Christopher Jezewski Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Christopher Jezewski returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

1Plasma-Assisted Atomic Layer Deposition of Palladium
2Inductively Coupled Hydrogen Plasma-Assisted Cu ALD on Metallic and Dielectric Surfaces