Takuya Kitamura Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by Takuya Kitamura returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
Number | Title |
---|---|
1 | Atomic layer epitaxy of germanium |
2 | Atomic hydrogen-assisted ALE of germanium |